Control of a Non-Linear Vacuum System Through a PID Controller

In this work obtaining and validating of a mathematical model of a plasma nitriding vacuum system is presented. The developed model is based on the analogy of a vacuum system with an electrical circuit. The model was performed with the aim to use it for the design and implementation of a Proportional Integral Derivative control algorithm. It has been demonstrated that this algorithm, which is based on the simulation on MATLAB Simulink, is suitable to the pressure control in the nitriding vacuum chamber.