کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
4957130 | 1444929 | 2017 | 5 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
An optical fiber Fabry-Perot pressure sensor using corrugated diaphragm and angle polished fiber
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موضوعات مرتبط
مهندسی و علوم پایه
مهندسی کامپیوتر
شبکه های کامپیوتری و ارتباطات
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: An optical fiber Fabry-Perot pressure sensor using corrugated diaphragm and angle polished fiber An optical fiber Fabry-Perot pressure sensor using corrugated diaphragm and angle polished fiber](/preview/png/4957130.png)
چکیده انگلیسی
In this paper, a Fabry-Perot pressure sensor using a corrugated diaphragm and angle polished fiber is proposed. A SU-8 structure using two step of lithography is formed to fix the polished fiber, which helps control the cavity length precisely. The fabrication process is described. The characteristics of both pressure and temperature are tested. Also the temperature compensation is realized. Experimental results show that the sensor has high sensitivity and good linearity over the pressure range of 0-0.1 MPa. The sensitivity (change in cavity/loaded pressure) is 705.64 μm/MPa.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Optical Fiber Technology - Volume 34, March 2017, Pages 42-46
Journal: Optical Fiber Technology - Volume 34, March 2017, Pages 42-46
نویسندگان
Jiali Zhu, Ming Wang, Lu Chen, Xiaoqi Ni, Haibin Ni,