کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
4962464 | 1446615 | 2016 | 7 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Flexible and Low-cost Production of Waveguide Based Integrated Photonic Devices
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی کامپیوتر
علوم کامپیوتر (عمومی)
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Flexible and Low-cost Production of Waveguide Based Integrated Photonic Devices Flexible and Low-cost Production of Waveguide Based Integrated Photonic Devices](/preview/png/4962464.png)
چکیده انگلیسی
We present a process to fabricate fully polymer based integrated optical devices which is based on maskless lithography and hot embossing. Using the maskless lithographic setup, we are able to create a hot embossing stamp in a flexible and fast manner. We demonstrate that our process is capable of creating linear optical waveguides, Y-splitters and Mach-Zehnder interferometers designed by preliminary optical simulations. The fabricated structures are analyzed with respect to optical smoothness and line edge roughness. In the future, our process will greatly enhance a fast design and fabrication of complex optical sensor structures.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Procedia Technology - Volume 26, 2016, Pages 309-315
Journal: Procedia Technology - Volume 26, 2016, Pages 309-315
نویسندگان
Maik Rahlves,