On the exploitation of mode localization in surface acoustic wave MEMS

Mode localization sensing has been recently introduced as an alternative resonant sensing protocol. It has been shown to exhibit several advantages over other resonant methods, in particular a potential for higher sensitivity and rejection of common mode noise. This paper expounds the principles of utilising surface acoustic waves (SAW) to create a mode localization sensor. A generalised geometry consisting of a pair of coupled resonant cavities is introduced and an analytical solution found for the displacement fields within the cavities. The solution is achieved by coupling the internal cavity solutions using a ray tracing method. The results of the analytical solution are compared to a numerical solution found using commercial finite element method (FEM) software; exact agreement is found between the two solutions. The insight gained from the analytical model enables the determination of critical design parameters. A brief analysis is presented showing analogous operation to previous examples of mode localization sensors. The sensitivity of the device is shown to depend nonlinearly on the number of periods in the array coupling the two cavities.