کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
499201 863032 2008 11 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
A continuum-based modeling of MEMS devices for estimating their resonant frequencies
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر نرم افزارهای علوم کامپیوتر
پیش نمایش صفحه اول مقاله
A continuum-based modeling of MEMS devices for estimating their resonant frequencies
چکیده انگلیسی

A continuum-based modeling of coupled electrostatics-structure interactions is presented for the frequency computations of MEMS devices. The present general formulation of electrostatics accounting for free space is validated first by specializing it to one-dimensional uniform motion of conducting surfaces and comparing the resulting electrostatics to conventional lumped models. The general coupled electrostatics-structure interactions are then applied for the prediction of resonant frequencies of MEMS devices due to bias-voltage changes and temperature variations. Comparisons of predicted resonant frequencies obtained by the present coupled electrostatics-structure interaction models with experimental results available in the literature demonstrate that the proposed continuum-based interaction modeling yields high-confidence predictions of resonant frequencies of MEMS devices.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Computer Methods in Applied Mechanics and Engineering - Volume 198, Issue 2, 1 December 2008, Pages 234–244
نویسندگان
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