Enhancing tilt range of electrostatic torsional micromirrors using robust adaptive critic-based neurofuzzy control

The robust adaptive critic-based neurofuzzy controller is simulated for a 1-DOF electrostatic torsional micromirror and the results show the effectiveness of this approach for various tilt ranges and conditions. In addition, the robustness of this controller is examined in the presence of input noises and parameter uncertainties.