کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5007124 | 1461560 | 2016 | 7 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Fast analytical design of MEMS capacitive pressure sensors with sealed cavities
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
سایر رشته های مهندسی
کنترل و سیستم های مهندسی
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Fast analytical design of MEMS capacitive pressure sensors with sealed cavities Fast analytical design of MEMS capacitive pressure sensors with sealed cavities](/preview/png/5007124.png)
چکیده انگلیسی
This paper presents a fast design strategy for MEMS capacitive pressure sensors with sealed cavities. Based on circular Kirchhoff-Love plate theory and the perfect gas law, the underlying analytical model allows for a rapid and accurate evaluation of the sensitivity of the sensors, crucial for improving their design in function of the reference pressure applied in the sealed cavities. The accuracy of the new model is demonstrated by comparing its predictions with more computationally expensive simulation techniques (high-order parametric element and three-dimensional finite element models) and with experimental measurements performed on a 300 µm diameter membrane fabricated using the Poly-SiGe platform developed at imec.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Mechatronics - Volume 40, December 2016, Pages 244-250
Journal: Mechatronics - Volume 40, December 2016, Pages 244-250
نویسندگان
V. Rochus, B. Wang, H.A.C. Tilmans, A. Ray Chaudhuri, P. Helin, S. Severi, X. Rottenberg,