A ultra-small-angle self-mixing sensor system with high detection resolution and wide measurement range

The self-mixing technique based on the traditional reflecting mirror has been demonstrated with great merit for angle sensing applications. Here we demonstrate a modified self-reflection-mixing angle measurement system by combine a right-angle prism to self-mixing angle measurement. In our system, the wavelength is crucial to the angle measurement resolution. For a microchip solid-state laser, the measurement resolution can reach 0.49 mrad, while the resolution for the He-Ne laser is 0.53 mrad. In addition, the ranges in the system with the microchip solid-state laser and He-Ne laser are up to 22 mrad and 24.9 mrad respectively. This modified angle measurement system effectively combines the advantage of self-mixing measurement system with a compact structure, providing interesting features such as of high requisition of resolution and precision.