Single-pulse femtosecond laser fabrication of concave microlens- and micromirror arrays in chalcohalide glass

The diffraction-limited plano-concave microlens- and micromirror arrays were produced in chalcohalide glass of 65GeS2-25Ga2S3-10CsCl composition transparent from ∼0.5 to 11 µm. Only a single 200 fs laser pulse with 800 nm central wavelength is required to form microlens, which after metal coating becomes a concave micromirror. This process can serve as a basis for flexible technology to fabricate regular microlens and micromirror arrays for optotelecom applications, its performance being limited only by repetition rate of the laser pulses (typically 1000 microlenses per second).