A novel 3D deformation measurement method under optical microscope for micro-scale bulge-test

A micro-scale 3D deformation measurement method combined with optical microscope is proposed in this paper. The method is based on gratings and phase shifting algorithm. By recording the grating images before and after deformation from two symmetrical angles and calculating the phases of the grating patterns, the 3D deformation field of the specimen can be extracted from the phases of the grating patterns. The proposed method was applied to the micro-scale bulge test. A micro-scale thermal/mechanical coupling bulge-test apparatus matched with the super-depth microscope was exploited. With the gratings fabricated onto the film, the deformed morphology of the bulged film was measured reliably. The experimental results show that the proposed method and the exploited bulge-test apparatus can be used to characterize the thermal/mechanical properties of the films at micro-scale successfully.