کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5008286 | 1461840 | 2017 | 4 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Fabrication of a true-Gaussian-shaped quartz crystal resonator
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موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
In this paper, a simple fabrication method for a Gaussian-shaped quartz crystal resonator was developed based on the surface tension of the photoresist. First, the photoresist profile on a quartz wafer was changed to a lens shape by the photoresist reflow. By changing the viscocity of the photoresist with propylene glycol monomethyl ether acetate, the photoresist profile on the quartz wafer was adjusted to create a Gaussian shape. Finally, the Gaussian-shaped QCR was fabricated by transferring the shape onto the quartz wafer using a reactive ion etching.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 260, 15 June 2017, Pages 58-61
Journal: Sensors and Actuators A: Physical - Volume 260, 15 June 2017, Pages 58-61
نویسندگان
Hiroki Kutsuwada, Sho Watanabe, Masayuki Sohgawa, Takashi Abe,