کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5008399 | 1461844 | 2017 | 7 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Suppression of the A-f-mediated noise at the top bifurcation point in a MEMS resonator with both hardening and softening hysteretic cycles
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موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
We study the nonlinear behavior of a microelectromechanical resonator implemented using the SilTerra MEMS on CMOS platform. The resonator shows, in a same frequency response, two hysteretic cycles of different origin: mechanical and electrical. We observe that, by increasing the resonator DC voltage, the resonator goes from having a purely mechanical (hardening) nonlinear response to a purely electrical (softening) one, experiencing a mixed regime where mechanical and electrical nonlinearities coexist and partially compensate. We explain how the compensation between nonlinearities can be used to improve the phase noise of an MEMS-based oscillator. Specifically, we show that it is possible to operate the resonator at the top bifurcation point, while at the same time suppressing the amplitude-mediated frequency noise.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 256, 1 April 2017, Pages 59-65
Journal: Sensors and Actuators A: Physical - Volume 256, 1 April 2017, Pages 59-65
نویسندگان
Guillermo Sobreviela, Gabriel Vidal-Álvarez, MartÃn Riverola, Arantxa Uranga, Francesc Torres, Núria Barniol,