Ultrafast 3D high precision print of micro structures for optical instrument calibration procedures

Multi-photon polymerization, like the so-called direct laser writing (DLW) technique allows for flexible additive manufacturing of three-dimensional ultra-precise structures on the micro- and nanoscale. A possible application for DLW is the manufacturing of measurement standards for calibration procedures of optical measurement instruments. This requires flexible and high precision manufacturing of individualized geometries with high quality surfaces. However, many of the process parameters in DLW have to be selected based on experience and previous knowledge.In this article, the influence of DLW process parameters on the micro-geometry and surface roughness produced are systematically studied, and optimized in terms of printing speed and manufacturing accuracy. Resulting microstructures are being evaluated with different measurement techniques, i.e., a stylus instrument, SEM and AFM. Based on optimized process parameters, a new measurement standard for the novel interferometric measurement instrument Ellipso-Height-Topometer is manufactured and examined as a case study. As a result, it can be shown, that DLW is able to manufacture ultra-precise micro geometries in a very flexible and very fast way and satisfies the tolerances for manufacturing of the designed measurement standard.