Structure and electrical properties of pure and yttrium-doped HfO2 films by chemical solution deposition through layer by layer crystallization process

Structure and electrical properties of pure and yttrium-doped HfO2 films by chemical solution deposition through layer by layer crystallization process

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Materials & Design - Volume 120, 15 April 2017, Pages 376-381

Hailong Liang, Jin Xu, Dayu Zhou, Xuexia Wang, Xiaohua Liu, Shichao Chu, Xiaoying Liu,