A Pseudo-Abbe comparator and double form measurement machine for high precision diameter and form calibrations

A concept for a novel diameter and form measuring instrument is described. The concept utilizes two independent z-axes towers on a common x-axis which each carry their own y-axis and tactile probes. The X- and Z-axes are equipped with metrology frames for compensating guide errors. An additional length metrology frame serves as reference for 8 interferometers which realize the length scale for measuring diameters and to compensate guide errors.