BEM approaches and simplified kinetic models for the analysis of damping in deformable MEMS

Microflows occurring in MEMS are addressed by applying a continuum BEM code for quasi-static Stokes flow accounting for slip boundary condition. Working conditions typical of transition and rarefied flows are treated in a simplified manner by employing a viscosity corrected according to semi-analytical solutions for the linearized BGK model of Couette and Poiseuille flows. Numerical results are compared with experiments showing excellent agreement