کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
513694 866514 2006 14 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Analysis of electrostatic MEMS using meshless local Petrov–Galerkin (MLPG) method
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر نرم افزارهای علوم کامپیوتر
پیش نمایش صفحه اول مقاله
Analysis of electrostatic MEMS using meshless local Petrov–Galerkin (MLPG) method
چکیده انگلیسی

We analyze electrostatic deformations of rectangular, annular circular, solid circular, and elliptic micro-electromechanical systems (MEMS) by modeling them as elastic membranes. The nonlinear Poisson equation governing their deformations is solved numerically by the meshless local Petrov–Galerkin (MLPG) method. A local symmetric augmented weak formulation of the problem is introduced, and essential boundary conditions are enforced by introducing a set of Lagrange multipliers. The trial functions are constructed by using the moving least-squares approximation, and the test functions are chosen from a space of functions different from the space of trial solutions. The resulting nonlinear system of equations is solved by using the pseudoarclength continuation method. Presently computed values of the pull-in voltage and the maximum pull-in deflection for the rectangular and the circular MEMS are found to agree very well with those available in the literature; results for the elliptic MEMS are new.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Engineering Analysis with Boundary Elements - Volume 30, Issue 11, November 2006, Pages 949–962
نویسندگان
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