کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
514883 866854 2006 6 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Energy-rate consideration in wafer bonding
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر نرم افزارهای علوم کامپیوتر
پیش نمایش صفحه اول مقاله
Energy-rate consideration in wafer bonding
چکیده انگلیسی

In the present study, we consider the bonding process of a pair of wafers with rough surfaces via an energy-rate concept in which “rate” refers to “area rate”. A finite element numerical simulation for a rough surface with periodical distributed asperities bonded onto a rigid half-space is carried out for demonstrating the energy-rate concept. The simulation reveals various phenomena in the wafer bonding, such as self-activated bonding, asperity shape effect and plastic deformation effect in the bonding process.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Finite Elements in Analysis and Design - Volume 42, Issues 8–9, May 2006, Pages 709–714
نویسندگان
, , ,