Generalized source method in curvilinear coordinates for 2D grating diffraction simulation

- Efficient numerical method for simulation of the light diffraction on multilayer metal-dielectric crossed gratings with smooth corrugation interfaces.
- The method is based on grating corrugation interface representation in curvilinear space.
- The concept of effective metric sources is extended for crossed gratings.
- Method parallelization on graphical processing units is demonstrated.

The article presents a curvilinear coordinate Fourier space integral method for linear optical rigorous grating diffraction simulation in 3D (crossed grating diffraction). The presented formulation extends our previous work on a related method for 1D periodic grating diffraction. Following this previous work we exploit a concept of the generalized metric sources to efficiently solve the Maxwell׳s equations. The article provides a general description of the method together with a detailed formulation and analysis of sinusoidal corrugation crossed grating diffraction.