2D double interaction method for modeling small particles contaminating microstructures located on substrates

An interaction model developed in previous research [de la Peña JL, González F, Saiz JM, Moreno F, Valle PJ. Sizing particles on substrates. A general method for oblique incidence. J Appl Phys 1999; 85:432] is extended to the study of two-scaled systems consisting of particles located on larger structures. Far-field scattering patterns produced by these systems can be obtained by coherent addition of different electromagnetic contributions, each one obtained from an independent isolated particle calculation. Results are performed on a 2D scheme, where they can be easily compared with those given by an exact method. This analysis shows some features of the scattering patterns that can be obtained with high reliability. Research on this kind of systems can be applied to 3D situations like particle-substrate contamination and particle-particle contamination.