Ozone-based Surface Conditioning Focused on an Improved Passivation for Silicon Heterojunction Solar Cells

This paper focuses on a new simple, cost effective and production-feasible ozone-based surface conditioning process for the controlled rounding and smoothing of textured surfaces applied in SHJ solar cells. The impact of surface conditioning on optical and morphological properties is analyzed for alkaline textured surfaces with small to medium and large size pyramids by reflection measurements and high resolution imaging methods as scanning electron microscopy (SEM) and atomic force microscopy (AFM).