کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5488498 | 1524107 | 2016 | 8 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Device-level vacuum packaged uncooled microbolometer on a polyimide substrate
ترجمه فارسی عنوان
در دستگاه سطح، میکروبولومتر خنثی نشده بر روی یک بستر پلی آمید بسته بندی شده است
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
فیزیک و نجوم
فیزیک اتمی و مولکولی و اپتیک
چکیده انگلیسی
Uncooled infrared detectors (IR) on a polyimide substrate have been demonstrated where amorphous silicon (a-Si) was used as the thermometer material. New concepts in uncooled microbolometers were implemented during the design and fabrication, such as the integration of a germanium long-pass optical filter with the device-level vacuum package and a double layer absorber structure. Polyimide was used for this preliminary work towards vacuum-packaged flexible microbolometers. The detectors were fabricated utilizing a carrier wafer and low adhesion strength release layer to hold the flexible polyimide substrate during fabrication in order to increase the release yield. The IR detectors showed a maximum detectivity of 4.54 Ã 106 cm Hz1/2/W at a 4 Hz chopper frequency and a minimum noise equivalent power (NEP) of 7.72 Ã 10â10 W/Hz1/2 at a biasing power of 5.71 pW measured over the infrared wavelength range of 8-14 μm for a 35 μm Ã 35 μm detector. These values are comparable to other flexible microbolometers with device-level vacuum packaging which are found in literature.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Infrared Physics & Technology - Volume 79, November 2016, Pages 50-57
Journal: Infrared Physics & Technology - Volume 79, November 2016, Pages 50-57
نویسندگان
Moinuddin Ahmed, Donald P. Butler, Zeynep Celik-Butler,