Tailoring the magnetic properties and thermal stability of FeSiAl-Al2O3 thin films fabricated by hybrid oblique gradient-composition sputtering

In this study, we systematically investigate the dynamic magnetic properties of FeSiAl-Al2O3 thin films fabricated by hybrid oblique gradient-composition sputtering technique with respect to temperature ranging from 300 K to 420 K. The magnetic anisotropy field HK and ferromagnetic resonance frequency fFMR can be tuned from 14.06 to 110.18 Oe and 1.05-3.05 GHz respectively, by changing the oblique angle, which can be interpreted in terms of the contribution of stress-induced anisotropy and shape anisotropy. In addition, the thermal stability of FeSiAl-Al2O3 films in terms of magnetic anisotropy HK and ferromagnetic resonance frequency fFMR are enhanced with the increase of oblique angle up to 35° while the thermal stability of effective Gilbert damping factor αeff and the maximum imaginary permeability μ''max are improved with the increase of oblique angle up to 45°.