کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
5497052 | 1399881 | 2017 | 8 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Effect of internal stress on nonlinearity and sensitivity of a pressure sensor with SiN composite diaphragm
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
فیزیک و نجوم
فیزیک و نجوم (عمومی)
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
This paper presents a simulation model that predicts the nonlinearity behavior of a piezoresistive pressure sensor under different film internal stresses. The ultra-compact sensor has a sensing diaphragm geometry of only 360μmÃ80μm, thereby shrinking the sensor chip size to 840μmÃ840μm. The absolute-pressure sensor is designed and fabricated by a surface-micromachining process. Analytical models based on small- and large-deflection theories are applied to predict the nonlinearity of the pressure sensor. The measured nonlinearity data well validate the predicted result from the modeling. The simulation results show that internal stress in the film can improve the linearity of the pressure sensor by lowering the sensitivity. The ultra-miniaturized sensor is promising in consumer electronics in terms of low-cost applications.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Physics Letters A - Volume 381, Issue 4, 30 January 2017, Pages 284-291
Journal: Physics Letters A - Volume 381, Issue 4, 30 January 2017, Pages 284-291
نویسندگان
Chen Zhou, Yanmin Zhang, Beirong Zheng, Wei Xue, Quan Wang,