Manufacturing of Self-bearing Microstructures of the Pseudo-metallic Type for Diffraction Experiments in the Terahertz Range

Specific features of the LIGA-technology methods elaborated at the Siberian Synchrotron and Terahertz Radiation Centre (SSTRC, BINP SB RAS) and fabrication of terahertz filters and optical elements based on high-aspect self-bearing microstructures of the pseudo-metallic type are described. The essence of the method consists in deep X-ray lithographic patterning of an organic glass (PMMA) substrate followed by covering its entire surface with a thin layer of metal (silver). The structures produced are using in the experiments at the Novosibirsk free electron laser.