Modeling and identification investigation of multi-field hysteretic dynamics in flexure-guided piezo platform

• The complete model with physical meanings is presented for the flexure-guided piezo platform.
• A comprehensive identification approach of the hysteretic dynamics is provided.
• Novel skills are provided to identify the electric and vibration dynamics.
• The modeling and identification approaches are demonstrated in the experimental studies.

The completely modeling and comprehensive identification approaches of the multi-field hysteretic dynamics in the flexure-guided piezo stage are proposed in this paper. First, the system description and the experimental setup are proposed. Next, the hysteretic dynamics is completely modeled in which the static Preisach hysteresis, creep, electrical and vibration dynamics are derived from the material, electrical and mechanical fields, respectively. Then, according to the model characteristics, a comprehensive identification approach is presented. A novel technique is provided to identify the electrical and vibration dynamics. Special inputs and sampling are proposed to identify the Preisach hysteresis. Finally, the experimental study is provided to demonstrate the effectiveness of the proposed modeling and identification approaches. The modeling and identification approaches in this paper will be beneficial to further developments and high-performance control of the flexure-guided piezo systems.