A Magnetic Microsystem on a Chip

A magnetic microsystem has been designed on a chip to demonstrate the improved performance of an integrated Hall element. The major deficiencies of relatively poor performance of an integrated Hall element has been upgraded through the use of a high efficiency, integrated micro coil, which has been optimized using multiphysics finite element tools. An extensive characterization of the integrated Hall element has allowed the creation of the most complete simulation model, which is usable both in a high level system simulator as well as in a detailed circuit simulation. All results were verified by measuring the fabricated ASIC.