کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
610845 880660 2009 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
Instability analysis of torsional MEMS/NEMS actuators under capillary force
موضوعات مرتبط
مهندسی و علوم پایه مهندسی شیمی شیمی کلوئیدی و سطحی
پیش نمایش صفحه اول مقاله
Instability analysis of torsional MEMS/NEMS actuators under capillary force
چکیده انگلیسی

The static and dynamic instabilities of a torsional MEMS/NEMS actuator caused by capillary effects are studied, respectively. An instability number, η  , is defined, and the critical gap distance, gcrgcr, between the mainplate and the substrate is derived. According to the values of η and g, the instability criteria of the actuator are presented. The dimensionless motion equation of the MEMS/NEMS torsional actuator is derived when it makes nonlinear oscillation under capillary force. The qualitative analysis of the nonlinear equation is made, and the phase portraits are presented on the phase plane. In addition, the bifurcation phenomena in the system are also analyzed.

The phase orbits connecting three equilibrium points on the phase plane, which include the periodic, heteroclinic and homoclinic orbits.Figure optionsDownload as PowerPoint slide

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Colloid and Interface Science - Volume 331, Issue 2, 15 March 2009, Pages 458–462
نویسندگان
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