An improved meniscus surface model for contacting rough surfaces

Based on the Extended-Maugis–Dugdale (EMD) elastic theory, a single asperity capillary meniscus model considering asperity deformation due to both contact and adhesive forces was developed. Specifically included in the single asperity meniscus model was the solid surface interaction inside the contact area. Subsequently, the single asperity model was coupled with a statistical roughness surface model to develop an improved meniscus surface model applicable to a wide-range of humidity levels and adhesion parameter values. Simulations were performed using typical surfaces found in microelectromechanical systems (MEMS) and magnetic storage hard disk drives to examine the effects of surface roughness and relative humidity. It was found that smoother surfaces give rise to higher adhesive and pull-off forces, and at higher relative humidity levels, the capillary force governs the adhesive behavior. As the humidity decreases, the solid surface interaction increases and needs to be included in the total meniscus adhesion. By integrating the adhesive force-displacement curves, the adhesion energy per unit area was calculated for MEMS surfaces and favorably compared with reported experimental data.

In the presence of capillary condensation, strong adhesive forces arise due to the formation of liquid menisci between proximity surfaces. An improved meniscus surface model was proposed including the effects of asperity deformations and the contribution of the solid surface interaction inside the contact zone.Figure optionsDownload as PowerPoint slide