Nanotribology properties of extremely thin diamond-like carbon films at high temperatures with and without vibration

► Nanowear resistance of FCVA-DLC film is high at RT but low at high temperatures. ► Wear increase of FCVA-DLC film corresponds to friction increase at high temperatures. ► Friction and wear of ECRCVD-DLC films are low at high temperatures. ► For FCVA-DLC films, removal of the wear debris by vibration decreases wear. ► For ECRCVD-DLC film, removal of tribochemical product by vibration increases wear.