کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
619628 1455046 2009 5 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
An investigation into the effect of film thickness on nanowear with amorphous carbon-based coatings
موضوعات مرتبط
مهندسی و علوم پایه مهندسی شیمی شیمی کلوئیدی و سطحی
پیش نمایش صفحه اول مقاله
An investigation into the effect of film thickness on nanowear with amorphous carbon-based coatings
چکیده انگلیسی

A sample oscillation module linked to a nanoindentation unit was used to perform nano-scale wear testing on a series of sputtered Cr doped amorphous C films deposited over a range of thicknesses (10, 20, 50, 150, and 2000 nm) under conditions relevant to MEMS and micro-scale engineering devices. A ruby sphere was used as the counter-body. Specific wear rates (defined as volume of worn material per unit applied load per unit of slid distance) were quantified and the effect of film thickness, applied load and test duration was investigated. Specific wear rate reduced exponentially with decreasing film thickness over the range of 10–2000 nm. The lowest wear rates were in the range of 0.1–6.1 × 10−17 m3 N−1 m−1. Specific wear rate reduced with increased applied load over the range of 0.1–10 mN. The data scatter of replicated testing reduced along with the reduction of wear rate. A rapid reduction of specific wear rate was observed during the first 3000 oscillation cycles. This was analogous to the ‘running in’ process observed with macroscopic tribology systems.

ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Wear - Volume 266, Issues 9–10, 24 April 2009, Pages 1039–1043
نویسندگان
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