To mitigate airborne molecular contamination through ultra-pure air system

► Ultra-Pure Air System (UPA) was experimentally established for solving AMC problems. ► The UPA used UV185+254nm to pre-treat insoluble AMCs into hydrophilic substances. ► The hydrophilic substances were post-treated by dehumidification processes. ► Xylene was used to exemplify the UPA with a removal rate of 99.99%. ► The UPA process obtained air quality less than 1 ppb within 10 s.