Effective platform for the generation of aerosol droplets and application in evaluating the effectiveness of a MEMS-based nanoparticle trapping device

The purpose of this study is two-fold: firstly, the development of a cheap, easy-to-construct and effective nanoparticle generator for testing nanoparticle sensors; secondly, the use of such a generator to test the effectiveness of a sensor device in trapping aerosolised nanoparticles. In this study, we have constructed an effective aerosol generator platform, based on aerosol-assisted chemical vapour deposition technology. Under well-controlled experimental conditions, this platform is capable of depositing aerosolised sodium chloride particles homogeneously on a substrate very effectively. Deposited aerosol droplets were subsequently dried and shown to form nanosized cubic crystals that are free from impurities. This platform was employed to test the effectiveness of a MEMS comb device in the electrostatic trapping of nanoparticles. Upon applying a DC bias (0.5 V) to the MEMS device, results showed an increase in nanoparticle deposition on the surface of the device, due to electrostatic precipitation. The presence of an electric field was shown to affect crystal formation upon drying of the aerosol droplets on the substrate; this caused a blotchy appearance on the SEM image, which was not observed in the absence of electric field.