Modeling and identification of vibration transmission in a dual-servo stage

During the operation of a dual-servo stage, the coarse stage and fine stage maintain a constant distance, and vibration of the coarse stage can be transmitted to the fine stage. A Lorentz planar motor (LPM) is used as a precision actuator for the fine stage, and vibration transmission directly affects the performance of the LPM. To study this vibration transmission, suitable experimental equipment is developed, and dynamic modeling and analysis of the LPM are performed. The relations between vibration transmission and the associated electric current, magnetic field, and displacement are obtained through force analysis. Then, an electromagnetic model is developed. An experimental approach is presented to identify the vibration transmission and stiffness of a spring. The experimental results show that the spring coefficient is negative and that the spring is responsible for vibration transmission.