Active vibration isolation of macro-micro motion stage disturbances using a floating stator platform

In macro-micro motion stage, high acceleration motion is provided by VCM. Vibration is induced from VCM, that is, VCM is a source system, the vibration response or force is felt by a receiver system. Generally, VCM is fixed on the base, which means that the base is the receiver system which absorbs or transfers the vibration. However, the vibration cannot completely disappear and the base vibration is inevitable. In the paper, a floated stator platform as isolation system is developed to decrease or isolate vibration between VCM and base. The floated stator platform consists of damper, stopper, floated lock, spring, limiter, sub base, etc. Unlike the traditional stator of VCM fixed on the base, the floated stator can be moved on the linear guide under vibration force or driven force. The springs are used to buffer shock at both end of the floated stator and the dampers are applied to absorb vibration before and after the floated stator. Limiter and stopper prevent the damper from impact damage in the linear direction. The springs and dampers form a spring-damping system, as shown in above figure. When VCM provides a large driven force transiently for high acceleration motion, the impact force or unpredictable vibration would be absorbed or decreased through the floated stator platform. The vibration of base will be weakened or eliminated and this can assure positional accuracy of grating ruler read head on positioning platform and others.