A prediction and evaluation system of the impact factors on the performance of the aerostatic slider

The correlation degree between the stiffness, which predicated by the neural network and the experimental results of the stiffness is obtained with the cross-correlation analysis method. The correlation coefficient of the stiffness of the gas film thickness and measured result is close to 1, which indicates that the gas film thickness of the slider is the main errors in test results. It provides the evaluation method to identify the effect of the influence factors on the performance of the aerostatic slider.