کد مقاله کد نشریه سال انتشار مقاله انگلیسی نسخه تمام متن
6954677 1451831 2018 11 صفحه PDF دانلود رایگان
عنوان انگلیسی مقاله ISI
A novel capacitive absolute positioning sensor based on time grating with nanometer resolution
ترجمه فارسی عنوان
سنسور موقعیت مطلق خازنی جدید بر اساس زمان گریت با رزولوشن نانومتری
کلمات کلیدی
اندازه گیری موقعیت مطلق، حسگر خازنی گریتینگ زمان،
موضوعات مرتبط
مهندسی و علوم پایه مهندسی کامپیوتر پردازش سیگنال
چکیده انگلیسی
The present work proposes a novel capacitive absolute positioning sensor based on time grating. The sensor includes a fine incremental-displacement measurement component combined with a coarse absolute-position measurement component to obtain high-resolution absolute positioning measurements. A single row type sensor was proposed to achieve fine displacement measurement, which combines the two electrode rows of a previously proposed double-row type capacitive displacement sensor based on time grating into a single row. To achieve absolute positioning measurement, the coarse measurement component is designed as a single-row type displacement sensor employing a single spatial period over the entire measurement range. In addition, this component employs a rectangular induction electrode and four groups of orthogonal discrete excitation electrodes with half-sinusoidal envelope shapes, which were formed by alternately extending the rectangular electrodes of the fine measurement component. The fine and coarse measurement components are tightly integrated to form a compact absolute positioning sensor. A prototype sensor was manufactured using printed circuit board technology for testing and optimization of the design in conjunction with simulations. Experimental results show that the prototype sensor achieves a ±300 nm measurement accuracy with a 1 nm resolution over a displacement range of 200 mm when employing error compensation. The proposed sensor is an excellent alternative to presently available long-range absolute nanometrology sensors owing to its low cost, simple structure, and ease of manufacturing.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Mechanical Systems and Signal Processing - Volume 104, 1 May 2018, Pages 705-715
نویسندگان
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