Preparation and micro-tribological property of hydrophilic self-assembled monolayer on single crystal silicon surface

The picture shows two steps of film forming process: firstly, silanol groups (3Si3OH) of TES monomer are combined with hydroxyl (3OH) of silicon surface or other silanol groups through hydrogen bonds; secondly, Si3O3Si bonds are formed by dehydration condensation of hydroxyls, and the film is polymerized and covered on the surface. Meanwhile the terminal ring structure increased the van der Waals force for the structure of the film.147