A statistical model for material removal prediction in polishing

► We establish a statistical model for the prediction of MRR in polishing ► MRR increases with the abrasive volume concentration and then settles down. ► The range of the particle size distribution makes the MRR vary in a different manner. ► Different types of active particles contribute quite differently to MRR. ► A harder or a more porous pad will lead to a larger MRR.