کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
7061359 | 1459018 | 2015 | 19 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
ZnO based SAW and FBAR devices for bio-sensing applications
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
مهندسی شیمی
جریان سیال و فرایندهای انتقال
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چکیده انگلیسی
ZnO thin film based surface and bulk acoustic wave devices are reviewed in this paper. The films were initially produced using a standard RF sputtering technique. However in order to produce lower stress, smoother films at low temperatures, a novel High Target Utilisation Sputtering (HiTUS) system has also been utilised. The ZnO acoustic devices have been used to move, mix, pump, eject and atomise liquids depending upon the amplitude of the signal and the condition of the surface. Such Surface Acoustic Wave (SAW) devices have also been shown to act as bio sensors but more sensitive detection is obtainable by the use of Film Bulk Acoustic Resonators (FBARs), the design and operation of which are described at the end of this review. Whilst the interaction of the acoustic wave with a fluid on its surface allows its rheological properties to be measured, such as viscosity, it is speculated that the combination of SAW and FBAR technologies may also provide new opportunities for rheometry on the microscale where fluids generally follow a non-Newtonian behaviour.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Journal of Non-Newtonian Fluid Mechanics - Volume 222, August 2015, Pages 209-216
Journal: Journal of Non-Newtonian Fluid Mechanics - Volume 222, August 2015, Pages 209-216
نویسندگان
A.J. Flewitt, J.K. Luo, Y.Q. Fu, L. Garcia-Gancedo, X.Y. Du, J.R. Lu, X.B. Zhao, E. Iborra, M. Ramos, W.I. Milne,