Modeling of Ultra-precision Pneumatic Servo Control Stage

One ultra-precision pneumatic servo motion stage combined fine and coarse control is designed in this paper. Metal bellows and the voice coil motor are used as the driving element, aerostatic stage is used to support the working stage, and the control accuracy of the motion stage is improved under conditions without friction. The hardware scheme is given in this paper, and the system mathematical model is established, and the control algorithm is analyzed too.