کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
7126610 | 1461548 | 2018 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Modeling of low-damping laterally actuated electrostatic MEMS
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
سایر رشته های مهندسی
کنترل و سیستم های مهندسی
پیش نمایش صفحه اول مقاله
چکیده انگلیسی
Most parallel-plate electrostatic MEMS feature an electrode moving vertically against a fixed electrode. Operating these systems in air triggers squeeze film damping and results in a low quality factor. In this paper, we present a new class of low-damping laterally actuated MEMS. Side actuation electrodes drive in-plane motions in order to take advantage of low damping couette flow resulting in a quality factor of 128. The design compensates for the small actuation electrodes area by amplifying the fringing electrostatic fields and reducing in-plane compliance which limits the actuation voltage to 40â¯V. A simple two mask process is proposed to fabricate the MEMS in the device layer of an SOI wafer. A lumped-mass model is developed as a design tool for this class of MEMS. It is validated by comparison to two finite element models.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Mechatronics - Volume 52, June 2018, Pages 1-6
Journal: Mechatronics - Volume 52, June 2018, Pages 1-6
نویسندگان
Tejinder Singh, Alaa Elhady, Huayong Jia, Ali Mojdeh, Cemalettin Kaplan, Vipul Sharma, Mohamed Basha, Eihab Abdel-Rahman,