کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
7127032 | 1461561 | 2016 | 16 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Deformation control of a thermal active mirror
ترجمه فارسی عنوان
کنترل تغییر شکل یک آینه فعال حرارتی
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
سایر رشته های مهندسی
کنترل و سیستم های مهندسی
چکیده انگلیسی
A demonstrator adaptive optics-system with a thermally actuated active mirror (AM) is presented to pre-study feasibility of sub-nm wavefront control in extreme ultraviolet (EUV) lithography. The AM is thermally actuated by selective heating using a spatial controllable heat source. Four different methods have been implemented to control the deformation of the AM. First thermal feedforward using estimated state feedback (ESF), second thermal feedback using proportional integral (PI) control, third their combination and fourth deformation feedback using PI control. To support ESF, a thermo-elastic finite element model is employed that describes the thermal deformation of the AM. ESF shows satisfying performance with a time constant of 10Â s and a residual error of 0.7Â nm. Thermal feedback shows large fluctuations of 12Â nm for spherical aberrations of due to feedback of noise from the thermal camera. By applying deformation feedback the RMS-error is reduced to a satisfying 0.25Â nm. This study shows that deformation control of this AM can be realised using thermal feedforward and deformation feedback to meet the requirements for EUV lithography.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Mechatronics - Volume 39, November 2016, Pages 12-27
Journal: Mechatronics - Volume 39, November 2016, Pages 12-27
نویسندگان
Rudolf Saathof, Martijn V. Wansink, Evert C. Hooijkamp, Jo W. Spronck, Robert H. Munnig Schmidt,