Periodic structures on germanium induced by high repetition rate femtosecond laser

Laser-induced periodic surface structures (LIPSS) are studied on germanium surface in air by the femtosecond pulsed laser with repetition frequency of 76 MHz and wavelength λ of 800 nm. Three types of LIPSS were found and they are low-spatial-frequency LIPSS (LSFL), high-spatial-frequency LIPSS (HSFL), and LSFL superimposed with HSFL. The period ΛLSFL of LSFL shrinks quickly from approximately 650 nm to 400 nm (∼λ/2) when lowering the scanning speed. Comparatively, the period ΛHSFL of HSFL keeps almost constant between 90 and 100 nm (∼λ/8) when the scanning speed and the laser pulse energy vary. LSFL and HSFL coexist when the laser pulse energy is around 3.3 nJ/pulse and the scanning speed ranges between 3 and 8 mm/s. The surface plasmon polariton waves make a contribution to the formation of LIPSS and the fourth harmonic generation (FHG) might be involved in the formation of HSFL.