Monomode optical planar and channel waveguides in Yb3+-doped silicate glasses formed by helium ion implantation

Optical planar and channel waveguides in Yb3+-doped silicate glasses are fabricated by triple-energy helium ion implantation at a total dose of 6.0×1016 ions/cm2. The dark mode spectroscopy of the planar waveguide was measured using a prism coupling arrangement. The near-field mode profiles of the planar and channel waveguide were obtained with an end-face coupling system. The refractive index profile was reconstructed by the intensity calculation method. The results indicate that a refractive index enhanced region as well as an optical barrier has been created after the beam process. After post-implantation treatment at 260 °C for 1 h, the channel waveguides possessed a propagation loss of ∼1.2 dB/cm. The acceptable guiding properties suggest that further waveguide lasers may be realized on the He-implanted Yb3+-doped silicate glass waveguides.