Experiment of Si target ablation with soft X-ray laser operating at a wavelength of 46.9Â nm

► We focused X-ray laser at 46.9 nm with a cylinder reflector. ► We simulated the beam focused path with ZEMAX software. ► The measurable ablation patterns were gained on the surface of Si targets around the focal region. ► More ablation patterns were gained on the surface of Si targets away from the focal region.