کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
7131188 | 1461682 | 2018 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Wavelength-dispersed optical-line scanning super-resolution interferometry for fast measurement of precision surface
ترجمه فارسی عنوان
تفاضلی با وضوح فوق العاده با وضوح پهنای باند برای اندازه گیری سریع سطح دقیق
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موضوعات مرتبط
مهندسی و علوم پایه
سایر رشته های مهندسی
مهندسی برق و الکترونیک
چکیده انگلیسی
A new precision surface measurement technology which is based on wavelength-dispersed optical-line scanning interferometry and is endowed with both vertical super-resolution and lateral super-resolution is proposed. The light from a broadband light source is dispersed by a blazed grating to be an optical line scanning the surface to realize fast three dimensional (3D) surface measurement. Vertical super-resolution of less than 1â¯nm is obtained by the means of optical interferometry. By employing an optical amplitude pupil filter, the lateral resolution in one direction is achieved to be less than 0.5â¯Î¼m. And by expanding the interferometric beam before being detected by a linear array CCD, the lateral resolution in the other direction can be less than 0.8â¯Î¼m. The wavelength of the light reflected from each measured point on the surface is unvariable and the measurement results can be wavelength-traceable exactly.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Optics and Lasers in Engineering - Volume 111, December 2018, Pages 19-24
Journal: Optics and Lasers in Engineering - Volume 111, December 2018, Pages 19-24
نویسندگان
Hui Wang, Fang Xie, Sen Ma, Yunzhi Wang, Lianlian Dong, Hengxiao Xu,