کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
7132831 | 1461726 | 2015 | 6 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
Shape reconstruction from gradient data in an arbitrarily-shaped aperture by iterative discrete cosine transforms in Southwell configuration
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
سایر رشته های مهندسی
مهندسی برق و الکترونیک
پیش نمایش صفحه اول مقاله
![عکس صفحه اول مقاله: Shape reconstruction from gradient data in an arbitrarily-shaped aperture by iterative discrete cosine transforms in Southwell configuration Shape reconstruction from gradient data in an arbitrarily-shaped aperture by iterative discrete cosine transforms in Southwell configuration](/preview/png/7132831.png)
چکیده انگلیسی
The shape reconstruction from gradient data is a common problem in many slope-based metrology applications. In practice, the gradient data may not be ideally available for the whole field of view as expected, due to the aperture or the unmeasurable part of sample. An iterative method by using discrete cosine transforms is addressed in this work to deal with the integration problem with incomplete gradient dataset in Southwell configuration. Simulation indicates that the discrete cosine transform provides better initial values than discrete Fourier transform does, and it converges to a more accurate level by updating with spectrum-based slopes comparing to the slope updates from finite difference in classical method. Experimental results show the feasibility of the proposed approach in a practical measurement.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Optics and Lasers in Engineering - Volume 67, April 2015, Pages 176-181
Journal: Optics and Lasers in Engineering - Volume 67, April 2015, Pages 176-181
نویسندگان
Lei Huang, Mourad Idir, Chao Zuo, Konstantine Kaznatcheev, Lin Zhou, Anand Asundi,