کد مقاله | کد نشریه | سال انتشار | مقاله انگلیسی | نسخه تمام متن |
---|---|---|---|---|
7133806 | 1461829 | 2018 | 11 صفحه PDF | دانلود رایگان |
عنوان انگلیسی مقاله ISI
A mems variable optical attenuator based on a vertical comb drive with self-elevated stators
ترجمه فارسی عنوان
یک یادآور اتماتور نوری متغیر بر اساس یک درایو عمودی با استاتور های خود را افزایش می دهد
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کلمات کلیدی
موضوعات مرتبط
مهندسی و علوم پایه
شیمی
الکتروشیمی
چکیده انگلیسی
Vertical comb drives are critical for electrostatic optical switches and variable optical attenuators (VOAs), but fabricating vertical comb drives requires the formation of two levels of comb fingers and thus suffers from the difficulty of dealing with the comb-finger alignment. This paper presents a vertical comb drive design and its micro-fabrication method that can realize self-aligned two-level comb fingers. The self-aligned vertical comb fingers are enabled by a novel vertically-elevated flat-end (VEFE) bimorph structure. Both the stator and rotor fingers of the vertical comb drive are formed by the same photomask and the same silicon etching step, which automatically ensures accurate alignment of the stator and rotor fingers. The vertical separation between the stator and rotor is created by the VEFE structure. A 1mm-aperture MEMS mirror with the proposed VEFE comb drive has been fabricated using SOI wafers with buried cavities. The mirror rotates 0.94° at 8 Vdc. The resonant frequency is 1.428 kHz. The MEMS mirror has been assembled into a VOA module. Measurements show that the VOA achieved a dynamic range of 55 dB and an insertion loss of less than 0.4 dB and met the telecommunications standards on shock, vibration and long-term stability.
ناشر
Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 271, 1 March 2018, Pages 398-408
Journal: Sensors and Actuators A: Physical - Volume 271, 1 March 2018, Pages 398-408
نویسندگان
J. Cheng, W. Liu, Q. Chen, N. Xu, Q. Sun, Y. Liu, W. Wang, H. Xie,