A low-g MEMS inertial switch with a novel radial electrode for uniform omnidirectional sensitivity

A low-g MEMS inertial switch with a novel radial electrode for uniform omnidirectional sensitivity

Database: Elsevier - ScienceDirect (ساینس دایرکت)
Journal: Sensors and Actuators A: Physical - Volume 270, 1 February 2018, Pages 214-222

Du Liqun, Li Yu, Zhao Jian, Wang Weitai, Zhao Wenjun, Zhao Wen, Zhu Heqing,